Quartz sleeves are used as protective barriers, structural supports, or alignment guides within high-temperature semiconductor tools. At LTD Material, we manufacture custom quartz sleeves tailored to meet tight dimensional tolerances, high thermal loads, and process-specific requirements.
Whether functioning as a liner, spacer, or interface component, our sleeves are built for precision, purity, and repeatability.
Key Features
- Manufactured from high-purity fused quartz for thermal and chemical resistance
- Available in cylindrical, tapered, slotted, or notched designs
- Custom inner/outer diameters, wall thicknesses, and lengths
- Compatible with horizontal and vertical furnace systems
Applications
- Inner liners for process tubes or reactors
- Spacers or guides for wafer carriers and pedestals
- Structural reinforcements in heated assemblies
- Second-source replacement or retrofit parts
Customization & Support
Our sleeves are fully customizable to match OEM specs or meet your tool’s unique requirements. We also support prototype iterations, fast-turn replacements, and copy-exact builds.
