Ringboats are specialized quartz components used to securely hold wafers or substrates during high-temperature processing. At LTD Material, we fabricate precision quartz ringboats designed for thermal stability, uniform spacing, and minimal contamination in diffusion, oxidation, and LPCVD applications.
Our ringboats are custom-built to your tool’s exact specifications—ensuring consistent performance, run after run.
Key Features
- Made from high-purity fused quartz for superior thermal and chemical resistance
- Engineered for uniform wafer spacing to promote even process distribution
- Available in standard and custom configurations (vertical or horizontal orientation)
- Options for integrated support arms, alignment features, or stackable designs
- Fire-polished surfaces to minimize particle shedding and defect risk
Applications
- Vertical and horizontal furnace wafer holding
- Diffusion and LPCVD systems
- Custom tooling for pilot lines or low-volume processes
- OEM replacement or second-source supply
Customization & Support
We support wafer sizes from 100 mm to 300 mm and can design ringboats to accommodate varying slot counts, orientations, or material flows. Whether reverse-engineered from a sample or built from scratch, every ringboat is made with precision and durability in mind.
