Process tubes are the backbone of many semiconductor furnace systems, providing the sealed environment necessary for high-temperature diffusion, oxidation, and deposition processes. At LTD Material, we manufacture high-purity quartz process tubes designed to withstand extreme thermal conditions while maintaining dimensional integrity and chemical purity.
Key Features
- Made from clear or opaque fused quartz with high thermal shock resistance
- Available in single- or double-open-end formats, with custom lengths and diameters
- Options for flanges, lips, notches, or grooves for tool integration
- Compatible with horizontal and vertical furnace systems
- Excellent resistance to devitrification and chemical etching
Applications
- LPCVD and diffusion furnace chambers
- Oxidation and annealing systems
- Cleanroom tool retrofits and OEM replacements
- Custom research and development setups
Customization & Support
Our process tubes can be built to standard OEM dimensions or custom-engineered to meet non-standard tool requirements. We offer resizing, polishing, and surface finishing options to match your exact process specifications.
