Quartz pedestals provide critical support for wafers, boats, and process assemblies in high-temperature semiconductor applications. At LTD Material, we manufacture custom quartz pedestals designed to maintain structural integrity and dimensional accuracy under extreme thermal and chemical conditions.
Whether you’re supporting a single wafer or an entire stack, our pedestals are engineered for strength, stability, and purity.
Key Features
- Constructed from high-purity fused quartz to prevent outgassing and contamination
- Available in solid, slotted, or hollow-core designs to meet thermal and structural requirements
- Machined and fire-polished for smooth finishes and reduced particle generation
- Tolerances maintained to ensure consistent height and planarity
- Fully compatible with OEM and custom furnace configurations
Applications
- Wafer support in vertical and horizontal furnaces
- Diffusion and deposition processes
- Base structures for boats, sleeves, or fixture assemblies
- Precision stacking and thermal uniformity control
Customization & Support
We offer a variety of pedestal formats—including tapered, multi-tiered, and through-hole designs—tailored to your tool and process needs. Exact copy services are available for legacy parts or multi-supplier sourcing strategies.
