Quartz injectors play a critical role in precise gas delivery within semiconductor tools, particularly in deposition and diffusion processes. At LTD Material, we manufacture custom quartz injectors engineered for accurate flow distribution, thermal stability, and long-term reliability in aggressive process environments.
Our injectors are used in applications where gas uniformity, low particle generation, and structural precision are essential to tool performance.
Key Features
- Fabricated from high-purity fused quartz to prevent contamination or chemical interaction
- Designed for uniform gas dispersion through precision-drilled or laser-cut hole arrays
- Available in both round and flat formats, including multi-zone and custom flow patterns
- Integrated with rails, supports, or collars to fit your tool’s specific configuration
- Compatible with both OEM tools and custom process systems
Applications
- LPCVD, PECVD, and ALD gas delivery
- Vertical and horizontal furnace systems
- Ring and showerhead-style injector configurations
- Retrofit or second-source component replacement
Customization & Support
Our engineering team can reverse-engineer injectors from samples or work from customer drawings to produce exact copy replacements or enhanced-performance alternatives. We also support iterative development for new tool designs or flow uniformity improvements.
