Quartz domes are used in a variety of semiconductor and advanced manufacturing processes where uniform thermal distribution, chemical resistance, and optical access are essential. At LTD Material, we fabricate high-purity quartz domes with precise curvature, clarity, and structural integrity to meet exact tool and process requirements.
Key Features
- Custom-formed from high-purity quartz for excellent thermal stability and low particle generation
- Available in clear or opaque quartz, depending on heat uniformity and process visibility needs
- Precision-formed geometry for optimal fit and chamber sealing
- Compatible with plasma etch, CVD, and photonic processes
- Optional polishing, fire-finishing, or surface enhancement treatments available
Applications
- Plasma chamber covers
- CVD and etch system dome assemblies
- Optical or inspection chamber windows
- Custom thermal shield applications
Customization & Support
We manufacture domes in a wide range of diameters, heights, wall thicknesses, and flange styles. Our team can replicate existing designs, match OEM specifications, or collaborate on new builds for emerging tools and processes.
