Quartz chamber liners are essential for protecting furnace tubes, deposition chambers, and reactor walls from chemical exposure, thermal cycling, and particle contamination. At LTD Material, we manufacture custom quartz liners that extend equipment life and maintain process integrity in demanding high-temperature environments.
Our liners are used in CVD, diffusion, and etch systems, where purity and dimensional accuracy are non-negotiable.
Key Features
- Manufactured from high-purity fused quartz to prevent contamination and reaction with process gases
- Available in a variety of shapes: tubes, sleeves, domes, or custom builds
- Precision-formed to fit OEM chambers or custom tools
- Engineered to withstand thermal shock, aggressive chemistries, and mechanical stress
Seamless integration into hot zones or protective barrier assemblies
Applications
- Diffusion furnace chamber protection
- CVD process chamber liners
- Etch system barriers
- Retrofit or second-source replacement parts
Customization & Support
Our engineering team can work from your drawing, existing part, or even in-process tool measurements to build a chamber liner that fits precisely and performs reliably. We also offer prototyping and iterative design support for new tools or process development.
