Quartz boats are critical components in wafer handling, thermal processing, and deposition applications. At LTD Material, we manufacture high-purity quartz boats designed for dimensional stability, thermal shock resistance, and long service life in high-temperature environments.
Our boats are used in semiconductor diffusion furnaces, LPCVD systems, and oxidation processes, where consistency and cleanliness are essential.
Key Features
- Precision-machined to meet strict flatness and parallelism tolerances
- Available in clear or opaque quartz, depending on thermal or optical needs
- Designed for minimal particle generation and high thermal uniformity
- Options for wafer slots, rails, supports, or custom builds based on your process
- Compatible with standard wafer sizes (100mm, 150mm, 200mm, 300mm) or customized to your requirements
Applications
- Wafer processing and transport
- Vertical and horizontal furnace operations
- High-purity thermal environments
Replacement for OEM or legacy tools
Customization & Support
Need a specific design or second-source match? Our engineering team can reverse-engineer from samples or work from drawings to replicate existing parts with copy exact precision.
