LTD Material offers a proprietary surface treatment process designed to extend tool life and reduce contamination in demanding deposition environments. Our treatment modifies the microstructure of the quartz surface, enhancing film adhesion and reducing the risk of particle-related failures.
Why It Matters
In CVD and other vacuum-based processes, delamination and particle generation can directly impact tool uptime, wafer yield, and maintenance costs. Our enhancement process has helped customers achieve:
- Up to 50% longer Mean Time Between Maintenance (MTBM)
- Improved film adhesion for more stable, uniform coatings
- Cleaner process chambers and reduced downtime due to surface failure
Consistent Performance, Every Time
This treatment is available for a wide range of quartz geometries and is applied under controlled conditions to ensure:
- High batch-to-batch repeatability
- Compatibility with critical process surfaces
Long-term stability in thermal and chemical cycling environments
